Nanofabrication Techniques and Principles |
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Editor:
| Stepanova, Maria Dew, Steven |
ISBN: | 978-3-7091-1666-1 |
Publication Date: | Jan 2014 |
Publisher: | Springer
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Imprint: | Springer Vienna, AUT |
Book Format: | Paperback |
List Price: | USD $169.99 |
Book Description:
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This volume updates scientists and engineers on the state of the art in various key techniques used to fabricate nanoscale structures. As well as covering lithographic creation of nano features, it focuses on new and revolutionary devices such as biosensors.
This volume updates scientists and engineers on the state of the art in various key techniques used to fabricate nanoscale structures. As well as covering lithographic creation of nano features, it focuses on new and revolutionary devices such as biosensors.