Optical Imaging in Projection Microlithography |
|
| Author:
| Wong, Alfred K. |
| Series title: | Tutorial Texts |
| ISBN: | 978-0-8194-5829-2 |
| Publication Date: | Mar 2005 |
| Publisher: | SPIE
|
| Book Format: | Paperback |
| List Price: | USD $66.00 |
Book Description:
|
An integrated mathematical view of the physics and numerical modeling of optical projection lithography that covers the full spectrum of the important concepts. Readers with a good working knowledge of calculus can follow the development, technologists can gather concepts and the equations that result. The casual reader will gain a perspective.
An integrated mathematical view of the physics and numerical modeling of optical projection lithography that covers the full spectrum of the important concepts. Readers with a good working knowledge of calculus can follow the development, technologists can gather concepts and the equations that result. The casual reader will gain a perspective.