Optical Materials Microstructuring Surfaces with off-Electrode Plasma |
|
| Author:
| Kazanskiy, Nikolay L.
Kolpakov, Vsevolod A. |
| ISBN: | 978-1-315-27993-0 |
| Publication Date: | Mar 2017 |
| Publisher: | Taylor & Francis Group
|
| Imprint: | CRC Press |
| Book Format: | Digital (delivered electronically) |
| List Price: | USD $79.95 |
Book Description:
|
This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of...
More Description
This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed.