Optical Micro- And Nanometrology in Manufacturing Technology |
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| Author:
| Gorecki, Christophe
Asundi, Anand |
| Series title: | Proceedings of SPIE Ser. |
| ISBN: | 978-0-8194-5380-8 |
| Publication Date: | Aug 2004 |
| Publisher: | SPIE
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| Book Format: | Undefined |
| List Price: | Contact Supplier contact
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Book Description:
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Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.
Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.