Polymeric Materials for Microelectronic Applications Science and Technology |
|
| Editor:
| Ito, Hiroshi
Tagawa, Seiichi
Horie, Kazuyuki |
| Series title: | ACS Symposium Ser. |
| ISBN: | 978-0-8412-3055-2 |
| Publication Date: | May 1995 |
| Publisher: | American Chemical Society
|
| Book Format: | Hardback |
| List Price: | USD $59.95 |
Book Description:
|
Reports recent developments in polymer science and technology pertinent to microelectronics. Addresses such topics as photophysics and radiation physics and chemistry of polymers; photoresists, electron beam resists, and X-ray resists; insulating materials in microelectronics; photoresponsive materials; silicon-containing polymers; conducting polymers; and optoelectronic materials. Includes international contributions from both academia and industry.
Reports recent developments in polymer science and technology pertinent to microelectronics. Addresses such topics as photophysics and radiation physics and chemistry of polymers; photoresists, electron beam resists, and X-ray resists; insulating materials in microelectronics; photoresponsive materials; silicon-containing polymers; conducting polymers; and optoelectronic materials. Includes international contributions from both academia and industry.