| Predictive Modeling for Intelligent Maintenance in Complex Semiconductor Manufacturing Processes | | Author:
| Liu, Yang | ISBN: | 978-1-243-49334-7 | Publication Date: | Sep 2011 | Publisher: | Creative Media Partners, LLC
| Imprint: | Proquest, UMI Dissertation Publishing | Book Format: | Paperback | List Price: | USD $69.00 |
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