| Sensor-Based Modeling and Monitoring of Chemical Mechanical Polishing | | | Author:
| Rao, Prahalada
Komanduri, Ranga
Bukkapatnam, Satish | | ISBN: | 978-3-639-03564-3 | | Publication Date: | Dec 2008 | | Publisher: | AV Akademikerverlag GmbH & Co. KG
| | Book Format: | Paperback | | List Price: | USD $11.00 |
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