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Sputtering by Particle Bombardment I

Physical Sputtering of Single-Element Solids

Sputtering by Particle Bombardment I( )
Editor: Behrisch, R.
Series title:Topics in Applied Physics Ser.
ISBN:978-3-540-38514-1
Publication Date:Jan 2006
Publisher:Springer
Book Format:Ebook
List Price:USD $99.00
Book Description:

With contributions by numerous experts

Book Details
Pages:284



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