The Physics of Micro/Nano-Fabrication |
|
| Author:
| Brodie, Ivor
Muray, Julius J. |
| Series title: | Microdevices Ser. |
| ISBN: | 978-0-306-44146-2 |
| Publication Date: | Jan 1993 |
| Publisher: | Springer
|
| Book Format: | Hardback |
| List Price: | USD $219.99 |
Book Description:
|
In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.