ULSI Semiconductor Technology Atlas |
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| Author:
| Tung, Chih-Hang
Sheng, George T. T.
Lu, Chih-Yuan |
| ISBN: | 978-0-471-45772-5 |
| Publication Date: | Oct 2003 |
| Publisher: | John Wiley & Sons, Incorporated
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| Imprint: | Wiley-Interscience |
| Book Format: | Hardback |
| List Price: | USD $262.95 |
Book Description:
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Ultra Large Scale Integration (ULSI) refers to chips with more than 10,000,000 devices per chip. It is the natural outgrowth of VLSI (Very Large Scale Integration). ULSI Semiconductor Technology Atlas uses TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process technologies and associated problems.
Ultra Large Scale Integration (ULSI) refers to chips with more than 10,000,000 devices per chip. It is the natural outgrowth of VLSI (Very Large Scale Integration). ULSI Semiconductor Technology Atlas uses TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process technologies and associated problems.