Ultra Clean Processing of Semiconductor Surfaces XIV

14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018): Selected Peer Reviewed Papers from the 14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018), September 3-5, 2018, Leuven, Belgium

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Author:

Mertens, Paul
Meuris, Marc
Heyns, Marc

ISBN:

978-3-0357-1417-3

Publication Date:

Oct 2018

Publisher:

Trans Tech Publications, Limited

Book Format:

Paperback

List Price:

USD $275.00

Book Description:

14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018)Selected, peer reviewed papers from the 14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018), September 3-5, 2018, Leuven, Belgium

Book Details

Pages:	356
Detailed Subjects:	Technology & Engineering / Engineering (General)
Physical Dimensions (W X L X H):	6.63 x 9.36 x 0.702 Inches

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