Handbook of Microlithography, Micromachining, and Microfabrication Vol. 1Microlithography |
|
| Author:
| Rai-Choudhury, Prosenjit |
| Series title: | Press Monograph Ser. |
| ISBN: | 978-0-8194-2378-8 |
| Publication Date: | Oct 1999 |
| Publisher: | SPIE
|
| Book Format: | Hardback |
| List Price: | AUD $209.00 |
Book Description:
|
The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.
Copublished with IEE.
The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.
Copublished with IEE.