Impurity Doping Processes in Silicon |
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| Editor:
| Wang, F. F. Y. |
| Series title: | Issn Ser. |
| ISBN: | 978-0-08-098357-8 |
| Publication Date: | Dec 2012 |
| Publisher: | Elsevier Science & Technology Books
|
| Book Format: | Ebook |
| List Price: | USD $72.95USD $87.54 |
Book Description:
|
This book introduces to non-experts several important processes of impurity doping in silicon and goes on to discuss the methods of determination of the concentration of dopants in silicon. The conventional method used is the discussion process, but, since it has been sufficiently covered in many texts, this work describes the double-diffusion method.
This book introduces to non-experts several important processes of impurity doping in silicon and goes on to discuss the methods of determination of the concentration of dopants in silicon. The conventional method used is the discussion process, but, since it has been sufficiently covered in many texts, this work describes the double-diffusion method.